DISEÑO DE UN EQUIPO INDUSTRIAL DE ARCO PULSADO PARA LA PRODUCCIÓN DE PELICULAS DELGADAS MEDIANTE PAPVD
Abstract
Se ha diseñado un equipo multicátodo de tipo industrial, para la producción de películas delgadas mediante PAPVD, por la técnica de evaporación por arcos eléctricos pulsados. El equipo se compone de una cámara de vacío, con geometría cilíndrica y dimensiones 1 m de diámetro x 1 m de longitud. Las piezas se localizan en un árbol portamuestras intercambiable que tiene movimiento rotacional planetario. La evaporación se realiza simultáneamente en 8 blancos rotatorios, a través de una fuente de potencia controlada con tecnología IGBT. Todas las variables del proceso son controladas automáticamente.Downloads
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