Diseño y construccion de un calotest utilizado para medir espesores de peliculas delgadas


Authors

  • Vicente Benavides
  • Elizabeth Restrepo
  • Rodolfo Rodríguez
  • Alfonso Devia
  • Yuliette C. Arango

Abstract

Este artículo presenta el diseño, construcción y validación de un equipo “Calotest” para medir espesores de recubrimientos y películas. El equipo parte de la necesidad de caracterizar recubrimientos y capas obtenidos en laboratorios de la región. Para comprobar la exactitud del equipo se realizaron pruebas en películas de Zr/ZrN obtenidas por la técnica de deposición en fase vapor asistida por plasma PAPVD por arco pulsado. El valor de los espesores obtenidos por la técnica “Calotest” se comparó con los resultados obtenidos por microscópica de fuerza atómica (AFM) y Perfilometria.

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Published

2004-01-05

How to Cite

Benavides, V., Restrepo, E., Rodríguez, R., Devia, A., & Arango, Y. C. (2004). Diseño y construccion de un calotest utilizado para medir espesores de peliculas delgadas. Scientia Et Technica, 1(24). Retrieved from https://revistas.utp.edu.co/index.php/revistaciencia/article/view/7367

Issue

Vol. 1 No. 24 (2004)

Section

Ciencias Básicas

License

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